Perhydropolysilazane, composition containing same, and method for forming silica film using same

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United States of America Patent

PATENT NO 9793109
APP PUB NO 20160379817A1
SERIAL NO

15039440

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Abstract

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[Problem] To provide a perhydropolysilazane making it possible to form a siliceous film with minimal defects, and a curing composition comprising the perhydropolysilazane.

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Patent Owner(s)

Patent OwnerAddress
MERCK PATENT GMBH64293 DARMSTADT

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aoki, Hiroyuki Kakegawa, JP 122 1985
Barnickel, Bertram Bernd Kakegawa, JP 1 8
Kanda, Takashi Kakegawa, JP 105 887
Okamura, Toshiya Kakegawa, JP 9 9
Sakurai, Issei Kakegawa, JP 4 14

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