Two-stage dodecapole aberration corrector for charged-particle beam
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United States of America Patent
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Oct 17, 2017
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Sep 22, 2009
filing date -
Sep 24, 2008
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Abstract
An aberration corrector has two stages of dodecapole (12-pole) elements each of which has first through twelfth poles arranged in this order. Exciting coils of the (4n+1)th poles and the exciting coils of the (4n+4)th poles are connected with a first reversible power supply in series (where n=0, 1, 2) to produce magnetic fields which are identical in absolute value but mutually opposite in sense relative to the optical axis within a plane perpendicular to the axis. The exciting coils of the (4n+3)th poles and the exciting coils of the (4n+2)th poles are connected with a second reversible power supply in series to produce magnetic fields which are identical in absolute value but mutually opposite in sense relative to the optical axis within the plane perpendicular to the axis.
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