Flow control device equipped with flow monitor
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United States of America Patent
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Oct 17, 2017
Issued Date -
Sep 29, 2016
app pub date -
Mar 17, 2014
filing date -
Mar 17, 2014
priority date (Note) -
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Abstract
A flow control device equipped with flow monitor includes a build-down type flow monitor unit provided on an upstream side, a flow control unit provided on a downstream side of the build-down type flow monitor unit, a signal transmission circuit connecting the build-down type flow monitor unit and the flow control unit and transmitting a monitored flow rate of the build-down type flow monitor unit to the flow control unit, and a set flow rate value adjustment mechanism being provided in the flow control unit and adjusting a set flow rate of the flow control unit based on the monitored flow rate from the build-down type flow monitor unit.
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