Lightweight carrier structure, particularly for optical components, and method for its production

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United States of America Patent

PATENT NO 9791662
SERIAL NO

14511773

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Abstract

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A carrier structure (100), particularly for optical components, includes a carrier body (10) which is formed from ceramic with hollows (11), and at least one cover layer (21, 22) which is formed from glass, arranged on at least one surface of the carrier body (10), and is connected to the carrier body (10) by means of at least one bond connection (23, 24) produced by means of anodic bonding. Methods for producing the carrier structure (100) and the use of the carrier structure as a mirror body, carrier for optical components and/or mechanical carrier for dynamically moved components are also described.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VPO BOX 324 VELDHOVEN 5500 AH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baldus, Oliver Berlin, DE 6 26
Schmidt, Volker Berlin, DE 105 1552

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