Method for fabricating an embedded pattern using a transfer-based imprinting

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United States of America Patent

PATENT NO 9791601
APP PUB NO 20140311662A1
SERIAL NO

14194084

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Abstract

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In a method for fabricating an embedded pattern using a transfer-based imprinting, an adhesive layer is formed on a substrate. The adhesive layer has a photo curable resin. A stamp having a protruded pattern is prepared. A thin-film layer is formed on an outer surface of the protruded pattern of the stamp. The stamp having the thin-film layer contact with the adhesive layer is pressed to selectively transfer the thin-film layer of the protruded pattern to the adhesive layer. Ultraviolet rays (UV) are irradiated to cure the adhesive layer. The stamp is removed.

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Patent Owner(s)

Patent OwnerAddress
KOREA INSTITUTE OF MACHINERY & MATERIALSDAEJEON KOREA DAEJEON

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Dae-Guen Daejeon, KR 8 20
Choi, Jun-Hyuk Daejeon, KR 9 110
Jeong, Jun-ho Daejeon, KR 43 916
Jung, Joo-Yun Daejeon, KR 1 2
Kim, Cheol-Hyeon Daejeon, KR 1 2
Lee, Eung-Sug Changwon-si, KR 12 159
Lee, Ji-Hye Daejeon, KR 124 1079

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