Micropositioning device with multidegrees of freedom for piezoelectric actuators and associated method
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United States of America Patent
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Oct 17, 2017
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Feb 26, 2015
app pub date -
Mar 22, 2013
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Mar 22, 2012
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Abstract
A micropositioning device for a piezoelectric actuator includes a means for controlling an electric field applied to the piezoelectric actuator so as to deform the piezoelectric material, and means for simultaneous measurement of a variation of electric charge accumulated on the piezoelectric actuator resulting from the deformation; and means for acquiring measurements of the variation of electric charge, for processing these acquisitions and for estimating a displacement (x, y, z) of the piezoelectric actuator and/or an applied force.
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