Photo-acoustic device and method for non-contact measurement of thin layers
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United States of America Patent
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Oct 17, 2017
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Feb 16, 2015
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Feb 18, 2014
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Abstract
A measuring device for non-mechanical-contact measurement of a layer, the measuring device including a light source operative to generate a pulse adapted to interact with the layer so as to generate a thermal wave in a gas medium present adjacent the layer. The thermal wave causes an acoustic signal to be generated. The measuring device further includes a detector adapted to detect a first signal responsive to the acoustic signal, the detector not being in mechanical contact with the layer. The first signal is representative of the measured layer.
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