Temperature control apparatus, processing apparatus, and temperature control method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Oct 17, 2017
Issued Date -
N/A
app pub date -
Nov 9, 2012
filing date -
Nov 14, 2011
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A temperature control apparatus (70) includes a heat exchanger (71) configured to exchange heat with the surroundings using a phase change of a refrigerant, a rotary pump (73) configured to receive the refrigerant from the heat exchanger (71) and fuse the refrigerant with oil contained inside the rotary pump, and an oil water separator (74) configured to receive the refrigerant fused with the oil from the rotary pump (73) and separate the refrigerant from the oil. The temperature control apparatus further includes a refrigeration cycle that implements a cooling function by circulating the refrigerant separated from the oil back to the heat exchanger (71).
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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TOKYO ELECTRON LIMITED | TOKYO 107-6325 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Matsuzaki, Kazuyoshi | Ibaraki, JP | 16 | 159 |
# of filed Patents : 16 Total Citations : 159 | |||
Sasaki, Yasuharu | Miyagi, JP | 99 | 2172 |
# of filed Patents : 99 Total Citations : 2172 |
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- 8 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Apr 17, 2025 |
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Apr 17, 2029 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

Legal Events
Date | Code | Event | Description |
---|---|---|---|
Nov 05, 2007 | STCH | INFORMATION ON STATUS: PATENT DISCONTINUATION | free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
Oct 07, 2007 | FP | LAPSED DUE TO FAILURE TO PAY MAINTENANCE FEE | Effective Date: Oct 07, 2007 |
Oct 07, 2007 | LAPS | LAPSE FOR FAILURE TO PAY MAINTENANCE FEES | |
Apr 25, 2007 | REMI | MAINTENANCE FEE REMINDER MAILED | |
Oct 07, 2003 | I | Issuance | |
May 30, 2002 | P | Published | |
Jan 07, 2002 | F | Filing | |
Jan 11, 2000 | PD | Priority Date |

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