Local clean zone forming apparatus
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United States of America Patent
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Oct 17, 2017
Issued Date -
Dec 20, 2012
app pub date -
Feb 9, 2011
filing date -
Feb 15, 2010
priority date (Note) -
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Abstract
Provided is a local clean zone forming apparatus which has an excellent operability and can provide an excellent clean air space without restricting the installation location or the purpose of an operation. In the local clean zone forming apparatus, a pair of push hoods having air blowing surfaces between which an airflow alignment mechanism is formed to form uniform airflows, are disposed so that the uniform airflows discharged from the push hoods are opposite to and collide with each other in a positional relationship wherein the air blowing surfaces are parallel to each other, and the centers of the air blowing surfaces are not directly opposite to each other; and the uniform airflows are obliquely discharged at an angle with respect to the air blowing surfaces.
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