Exhaust pump
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United States of America Patent
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Oct 17, 2017
Issued Date -
Jun 27, 2013
app pub date -
Jul 21, 2011
filing date -
Sep 28, 2010
priority date (Note) -
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status (Latency Note)
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Abstract
An exhaust pump includes: a cylindrical rotating member; an outer cylindrical fixed member; an inner cylindrical fixed member a helical inner thread groove exhaust passage provided between the cylindrical rotating member and the inner cylindrical fixed member; connecting opening portions that are opened in the cylindrical rotating member and that lead a part of gas existing in the vicinity of the outer periphery of the cylindrical rotating member towards the inner thread groove exhaust passage. A gap between an upstream end of the connecting opening portions and lowermost stage rotor blades provided at the outer periphery of the cylindrical rotating member which is located upstream of the connecting opening portions has a dimension equal to or greater than a dimension that enables insertion, into the gap, of a tool for opening the connecting opening portions.
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