Abrasive particles, polishing slurry and method of fabricating abrasive particles
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United States of America Patent
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Oct 17, 2017
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app pub date -
Apr 8, 2016
filing date -
Jun 30, 2015
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Abstract
The present disclosure relates to abrasive particles, a polishing slurry and a fabricating method of the abrasive particles. The fabricating method of abrasive particles in accordance with an exemplary embodiment of the present disclosure includes preparing a precursor solution in which a first precursor is mixed with a second precursor that is different from the first precursor, preparing a basic solution, mixing the basic solution with the precursor solution and forming a precipitate, and washing abrasive particles synthesized by precipitation.
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