Micro-structured atomic source system
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United States of America Patent
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Oct 10, 2017
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app pub date -
Jan 24, 2017
filing date -
Apr 9, 2015
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Abstract
A micro-structured atomic source system is described herein. One system includes a silicon substrate, a dielectric diaphragm, wherein the dielectric diaphragm includes a heater configured to heat an atomic source substance, an intermediary material comprising a chamber configured to receive the atomic source substance, and a guide material configured to direct a flux of atoms from the atomic source substance.
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