Acoustic resonator and method of manufacturing the same
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United States of America Patent
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Oct 10, 2017
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app pub date -
Mar 4, 2015
filing date -
Sep 15, 2014
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Abstract
There is provided an acoustic resonator including: a resonance part including a first electrode, a second electrode, and a piezoelectric layer interposed between the first and second electrodes; and a substrate provided below the resonance part, wherein the substrate includes at least one via hole penetrating through the substrate and a connective conductor formed in the via hole and connected to at least one of the first and second electrodes. Therefore, reliability of the connective conductor formed in the substrate may be secured.
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