Pulsed light beam spectral feature control

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United States of America Patent

PATENT NO 9785050
SERIAL NO

14794508

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A system includes a first actuation module coupled to a first actuatable apparatus of an optical source, the first actuatable apparatus being altered by the first actuation module to adjust the spectral feature of the pulsed light beam; a second actuation module coupled to a second actuatable apparatus of the optical source, the second actuatable apparatus being altered by the second actuation module to adjust the spectral feature of the pulsed light beam; and a control system configured to receive an indication regarding the operating state of the first actuatable apparatus; and send a signal to the second actuation module to adjust the spectral feature of the pulsed light beam to either: prevent the first actuatable apparatus from saturating based on the operating state of the first actuatable apparatus, or desaturate the first actuatable apparatus if the first actuatable apparatus is saturated.

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Patent Owner(s)

  • CYMER, LLC

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ahlawat, Rahul San Diego, US 12 45
O'Brien, Kevin M San Diego, US 23 331

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