Vacuum processing system, vacuum processing device, lubricating agent supply device, and lubricating agent supplying method
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United States of America Patent
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Oct 10, 2017
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N/A
app pub date -
Jan 28, 2015
filing date -
Apr 28, 2014
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Abstract
A transport system is a vacuum processing system that includes a transport device that is provided in a vacuum, and a lubricating agent supply device that supplies lubricating agent to the transport device and provided in the ambient atmosphere. The transport device has a lubricating agent flow channel that is a channel for grease injected to a site subject to lubrication. The lubricating agent supply device has a grease server that stores a lubricating agent in the ambient atmosphere, a lubricating agent supply pipe which is a channel that guides the grease stored in the grease server to the lubricating agent flow channel and that connects the grease server and the lubricating agent flow channel, and an exhaust pump that exhausts the inside of the lubricating agent supply pipe.
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