Stator element for a holweck pump stage, vacuum pump having a holweck pump stage and method of manufacturing a stator element for a holweck pump stage
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United States of America Patent
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Oct 10, 2017
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N/A
app pub date -
Apr 22, 2014
filing date -
Apr 22, 2013
priority date (Note) -
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Abstract
A stator element for a Holweck pump stage has a base shape of substantially cylinder jacket shape or a kit of parts for a stator element for a Holweck pump stage which has a base shape of a substantially cylinder jacket shape, wherein the stator element or the kit of parts comprises a plurality of stator parts which are separate from one another, which are assembled to form the stator element or can be assembled to form the stator element. A vacuum pump having a Holweck pump stage as well as to a method of manufacturing a stator element for a Holweck pump stage or of manufacturing a kit of parts for a stator element for a Holweck pump stage are also disclosed.
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