Method of manufacturing micro-array substrate
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United States of America Patent
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Oct 10, 2017
Issued Date -
N/A
app pub date -
Jul 8, 2015
filing date -
Nov 12, 2014
priority date (Note) -
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Abstract
A method of manufacturing a microarray substrate having improved reliability and mass-production properties uses a vapor of a surface-reforming material, and includes washing a base substrate, supplying the vapor of the surface-reforming material into a container to which the base substrate is provided, and coupling the vapor of the surface-reforming material to a surface of the base substrate to form a self-assembled monolayer.
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International Classification(s)
- C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
- C03C:CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREO....
- B05D:PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MAT....
- B05B:SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- C12N:MICRO-ORGANISMS OR ENZYMES; COMPOSITIONS THEREOF
- B81C:PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE M....
- G01N:INVESTIGATING OR ANALYSING MATERIALS BY DETERMININ....
- B01L:CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENE....
- B01J:CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS, CO....
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