Method for producing a component

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United States of America Patent

PATENT NO 9783410
APP PUB NO 20160368761A1
SERIAL NO

15121638

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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In a method for producing a component, a first layer composite is first produced, comprising a structured layer and a trench filled with an insulating material. The structured layer is electrically conductive at least in a first region. The trench filled with an insulating material extends outwards from a first surface of the structured layer and is arranged in the first region of the structured layer. The first surface of the structured layer faces a first surface of the first layer composite. The method additionally has the step of producing a second layer composite, which has a first depression in a first surface of the second layer composite, and the step of connecting the first layer composite to the second layer composite. The first surface of the first layer composite adjoins the first surface of the second layer composite at least in some regions, said filled trench being arranged within the lateral position of the first depression. After the first layer composite has been connected to the second layer composite, the thickness of the first layer composite from a second surface of the first layer composite to the depth of the filled trench is reduced. The second surface of the first layer composite lies opposite the first surface of the first layer composite. The method further has the step of producing an active structure in the structured layer, said active structure comprising two second regions which are arranged in the first region of the structured layer and which are mechanically connected to each other in a rigid manner but are electrically insulated from each other by means of the filled trench.

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Patent Owner(s)

Patent OwnerAddress
NORTHROP GRUMMAN LITEF GMBHFREIBURG FREIBURG BADEN-WURTTEMBERG

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Breng, Uwe Gundelfingen, DE 7 108
Geiger, Wolfram Ebringen, DE 18 333
Hafen, Martin Rustenhart, FR 16 164
Spahlinger, Guenter Stuttgart, DE 17 95

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