Molded interconnect mircoelectromechanical system (MEMS) device package

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United States of America Patent

PATENT NO 9781519
SERIAL NO

15099096

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Abstract

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A microelectromechanical system (MEMS) device package for encapsulating a MEMS device a molded package spacer that connects to a conductive lid and to a substrate. The molded package spacer forms either side walls or a divider of the MEMS device package and is adapted to route electrical connections from the MEMS device to either the substrate or a second MEMS device package via the substrate.

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Patent Owner(s)

Patent OwnerAddress
ROBERT BOSCH GMBHSTUTTGART GERMANY
AKUSTICA INC2835 EAST CARSON STREET SUITE 301 PITTSBURGH PA 15203

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Saxena, Kuldeep Sewickley, US 12 42

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