Electrostatic discharge protection structure and fabrication method thereof

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United States of America Patent

PATENT NO 9780084
APP PUB NO 20160181237A1
SERIAL NO

15055613

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Abstract

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An electrostatic discharge protection structure includes: substrate of a first type of conductivity, well region of a second type of conductivity, substrate contact region in the substrate and of the first type of conductivity, well contact region in the well region and of the second type of conductivity, substrate counter-doped region between the substrate contact region and the well contact region and of the second type of conductivity, well counter-doped region between the substrate contact region and the well contact region and of the first type of conductivity, communication region at a lateral junction between the substrate and the well region, first isolation region between the substrate counter-doped region and the communication region, second isolation region between the well counter-doped region and the communication region, oxide layer having one end on the first isolation region and another end on the substrate, and field plate structure on the oxide layer.

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Patent Owner(s)

Patent OwnerAddress
CSMC TECHNOLOGIES FAB2 CO LTD214028 NO 8 XINZHOU ROAD NATIONAL HI TECH INDUSTRIAL DEVELOPMENT ZONE WUXI JIANGSU WUXI CITY JIANGSU PROVINCE 214028

International Classification(s)

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  • 2016 Application Filing Year
  • H01L Class
  • 27971 Applications Filed
  • 23507 Patents Issued To-Date
  • 84.05 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20162017201820192020202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dai, Meng Wuxi, CN 8 22
Hu, Yonghai Wuxi, CN 4 6
Lin, Zhongyu Wuxi, CN 9 13
Wang, Guangyang Wuxi, CN 12 27

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges26979357140748325312788503629173801 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +050010001500200025003000350040004500500055006000650070007500800085009000950010000

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