Apparatus for liquid treatment of wafer shaped articles
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Oct 3, 2017
Grant Date -
Aug 27, 2015
app pub date -
Feb 24, 2014
filing date -
Feb 24, 2014
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An apparatus for processing wafer-shaped articles comprises a spin chuck adapted to hold and spin a wafer-shaped article of a predetermined diameter during a processing operation. A liquid collector surrounds the spin chuck, and comprises a first inner surface. The first inner surface comprises a first conductive material. The collector further comprises a first conductive pathway for grounding the first conductive material.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
LAM RESEARCH AG | SEZ-STRASSE 1 9500 VILLACH 9500 |
International Classification(s)

- 2014 Application Filing Year
- H01L Class
- 23828 Applications Filed
- 21803 Patents Issued To-Date
- 91.51 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Pliska, Milan | Villach, AT | 6 | 16 |
# of filed Patents : 6 Total Citations : 16 | |||
Schwarzenbacher, Reinhold | Reisseck, AT | 9 | 21 |
# of filed Patents : 9 Total Citations : 21 |
Cited Art Landscape
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Patent Citation Ranking
- 2 Citation Count
- H01L Class
- 18.50 % this patent is cited more than
- 8 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Apr 3, 2025 |
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Apr 3, 2029 |
Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

Legal Events
Date | Code | Event | Description |
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Feb 22, 2021 | LAPS | LAPSE FOR FAILURE TO PAY MAINTENANCE FEES | free format text: PATENT EXPIRED FOR FAILURE TO PAY MAINTENANCE FEES (ORIGINAL EVENT CODE: EXP.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
Feb 22, 2021 | STCH | INFORMATION ON STATUS: PATENT DISCONTINUATION | free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
Jan 15, 2021 | FP | LAPSED DUE TO FAILURE TO PAY MAINTENANCE FEE | Effective Date: Jan 15, 2021 |
Sep 07, 2020 | FEPP | FEE PAYMENT PROCEDURE | free format text: MAINTENANCE FEE REMINDER MAILED (ORIGINAL EVENT CODE: REM.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
Jun 30, 2016 | FPAY | FEE PAYMENT | year of fee payment: 4 |
Jan 15, 2013 | I | Issuance | |
Dec 22, 2012 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
Jul 14, 2011 | P | Published | |
Mar 23, 2011 | F | Filing | |
Sep 08, 2003 | PD | Priority Date |

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