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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
ULVAC INC	2500 HAGISONO CHIGASAKI-SHI KANAGAWA 2538543 ?2538543

International Classification(s)

• C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Nakano, Katsuaki	Chigasaki, JP	17	96

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
7.5 Year Payment	$3600.00	$1800.00	$900.00	Apr 3, 2025
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Apr 3, 2029

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
October 03, 2017	US,9779958,B2   US9779958B2	GRANTED PATENT AS SECOND PUBLICATION
August 13, 2015	US,20150228496,A1   US20150228496A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 9779958

Method of, and apparatus for, forming hard mask

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