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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
ULVAC INC	2500 HAGISONO CHIGASAKI-SHI KANAGAWA 253-8543

International Classification(s)

• C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Nakano, Katsuaki	Chigasaki, JP	17	96
# of filed Patents : 17 Total Citations : 96

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• 0 Citation Count
• C23C Class

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• 8 Age

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
7.5 Year Payment	$3600.00	$1800.00	$900.00	Apr 3, 2025
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Apr 3, 2029

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
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Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
October 03, 2017	US,9779958,B2   US9779958B2	GRANTED PATENT AS SECOND PUBLICATION
August 13, 2015	US,20150228496,A1   US20150228496A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 9779958

Method of, and apparatus for, forming hard mask

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Abstract

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A method of forming a hard mask includes depositing step for depositing a titanium nitride film on a surface of a to-be-processed object; adsorbing step for adsorbing oxygen-containing molecules onto a surface of the titanium nitride film; and heating step for heating the titanium nitride film to a predetermined temperature.

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Description

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Claims

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Legal Events

 

• MAFP2025
• MAFP2021
• I2017
• STCF2017
• P2015
• F2014
• AS2014
• PD2014

Date	Code	Event	Description
Mar 26, 2025	MAFP	MAINTENANCE FEE PAYMENT	free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 8
Feb 02, 2021	MAFP	MAINTENANCE FEE PAYMENT	free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 4
Oct 03, 2017	I	Issuance
Sep 13, 2017	STCF	INFORMATION ON STATUS: PATENT GRANT	free format text: PATENTED CASE
Aug 13, 2015	P	Published
Dec 04, 2014	F	Filing
Nov 27, 2014	AS	ASSIGNMENT	free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:NAKANO, KATSUAKI;REEL/FRAME:034380/0680 Owner name: ULVAC, INC., JAPAN Effective Date: Nov 27, 2014
Feb 13, 2014	PD	Priority Date