Amino(iodo)silane precursors for ALD/CVD silicon-containing film applications and methods of using the same

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United States of America Patent

PATENT NO 9777373
SERIAL NO

14984866

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Abstract

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Disclosed are amino(iodo)silane precursors, methods of synthesizing the same, and methods of using the same to deposit silicon-containing films using vapor deposition processes. The disclosed amino(iodo)silane precursors include SiH2I(N(iPr)2) or SiH2I(N(iBu)2).

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Patent Owner(s)

Patent OwnerAddress
AMERICAN AIR LIQUIDE INC46409 LANDING PARKWAY FREMONT CA 94538

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kuchenbeiser, Glenn Newark, US 25 993
Lefevre, Bastien Wilmington, US 1 9

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