Chemical vapor deposition coating, article, and method

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United States of America Patent

PATENT NO 9777368
SERIAL NO

13504533

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Abstract

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The present invention relates to a chemical vapor deposition coating, a chemical vapor deposition article, and a chemical vapor deposition method. The coating, article, and method involve thermal decomposition of dimethylsilane to achieve desired surface properties.

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Patent Owner(s)

Patent OwnerAddress
SILCOTEK CORP225 PENN TECH DRIVE BELLEFONTE PA 16823

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Barone, Gary A State College, US 20 278
Mattzela, James B State College, US 22 149
Silvis, Paul H Port Matilda, US 23 235
Smith, David A Bellefonte, US 251 5391

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