Hand member and hand

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United States of America Patent

PATENT NO 9776333
APP PUB NO 20170144313A1
SERIAL NO

15337073

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Importance

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Abstract

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A hand member forms a hand of a robot arm for transferring a semiconductor wafer. The hand member is a U-shaped member on which the semiconductor wafer is placed. The hand member includes at least one fitting portion on which a frictional holding member for holding the semiconductor wafer is fitted sideways, on each of an inner edge and an outer edge.

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Patent Owner(s)

Patent OwnerAddress
HIRATA CORPORATION111 HITOTSUGI UEKI-MACHI KITA-KU KUMAMOTO-SHI KUMAMOTO-KEN

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sakai, Tetsuya Kumamoto, JP 102 1271
Sakaue, Hideki Kumamoto, JP 3 24

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