Decontamination process device and decontamination process method
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United States of America Patent
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Oct 3, 2017
Grant Date -
Jul 2, 2015
app pub date -
Dec 22, 2014
filing date -
Dec 26, 2013
priority date (Note) -
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Abstract
A decontamination process device includes a chamber that contains a decontamination target, a heating device that generates decontamination vapor, an air sending part that sends the decontamination vapor into the chamber, a ventilation system that ventilates the chamber, a controller that controls operations of the decontamination process device. The controller performs a supply process that supplies the decontamination vapor into the chamber and an elimination process that eliminates a decontamination component after the supply process. The ventilation system adjusts an ventilation amount and the controller is set to repeat the supply processes at multiple times, and to perform a dry process between the repeated supply processes and to maintain the chamber at a positive pressure during the dry process.
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