Laterally-doped MEMS resonator
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United States of America Patent
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-
Sep 26, 2017
Issued Date -
N/A
app pub date -
Dec 12, 2014
filing date -
Mar 29, 2012
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A microelectromechanical system (MEMS) resonator includes a substrate having a substantially planar surface and a resonant member having sidewalls disposed in a nominally perpendicular orientation with respect to the planar surface. Impurity dopant is introduced via the sidewalls of the resonant member such that a non-uniform dopant concentration profile is established along axis extending between the sidewalls parallel to the substrate surface and exhibits a relative minimum concentration in a middle region of the axis.
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International Classification(s)
- 2014 Application Filing Year
- H02N Class
- 332 Applications Filed
- 255 Patents Issued To-Date
- 76.81 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 5 Citation Count
- H02N Class
- 14.02 % this patent is cited more than
- 8 Age
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