Ultrasonic cleaning method and ultrasonic cleaning apparatus

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United States of America Patent

PATENT NO 9773688
APP PUB NO 20130312785A1
SERIAL NO

13891236

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Abstract

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An ultrasonic cleaning method for cleaning an object in a liquid in which a gas is dissolved includes preparing the liquid in which the gas is dissolved and stirring the liquid while irradiating the liquid with the ultrasonic waves so as to realize a state where bubbles containing the gas dissolved in the liquid continue to be generated. The object is cleaned in the state where the bubbles containing the gas continue to be generated.

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Patent Owner(s)

Patent OwnerAddress
SILTRONIC AGEINSTEINSTR 172 TOWER B / BLUE TOWER 81677 MÜNCHEN 81677

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Haibara, Teruo Hikari, JP 50 136
Kubo, Etsuko Yokkaichi, JP 11 23
Mori, Yoshihiro Shunan, JP 193 5414
Uchibe, Masashi Izumo, JP 11 23

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