Power generator with frequency tuning for use with plasma loads
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United States of America Patent
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Sep 26, 2017
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N/A
app pub date -
Mar 21, 2016
filing date -
Dec 4, 2012
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Abstract
A generator and method for tuning the generator are disclosed. The method includes setting the frequency of power applied by the generator to a current best frequency and sensing a characteristic of the power applied by the generator. A current best error based upon the characteristic of the power is determined, and the frequency of the power at the current best frequency is maintained for a main-time-period. The frequency of the power is then changed to a probe frequency and maintained at the probe frequency for a probe-time-period, which is less than the main-time-period. The current best frequency is set to the probe frequency if the error at the probe frequency is less than the error at the current best frequency.
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