Sample holder, charged particle beam apparatus, and observation method

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United States of America Patent

PATENT NO 9773640
APP PUB NO 20160035535A1
SERIAL NO

14810673

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Abstract

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An object of the present invention is to provide a sample holder that can carry out a series of observations in which a rotational series image at arbitrary angles, namely, from −180° to +180° around the x-axis of an observation region and a rotational series image at arbitrary angles, namely, from −180° to +180° around the y-axis are obtained without taking a sample out of a sample chamber.

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Patent Owner(s)

  • HITACHI, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kashima, Hideo Tokyo, JP 36 992
Shimakura, Tomokazu Tokyo, JP 11 31
Takahashi, Yoshio Tokyo, JP 87 925

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