Specimen preparation device

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United States of America Patent

PATENT NO 9773638
SERIAL NO

14945630

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Abstract

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A specimen preparation device prepares a cross section of a specimen by applying an ion beam, the specimen preparation device including: an ion beam generator that generates the ion beam; a specimen holder that holds the specimen; a shield plate that shields part of the specimen from the ion beam; and a tilted plate that is placed to intersect a path of the ion beam on a downstream side of the specimen, and has an incidence surface that is tilted relative to a direction in which the ion beam is incident.

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Patent Owner(s)

Patent OwnerAddress
JEOL LTDTOKYO JAPAN TOKYO METROPOLIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asahina, Shunsuke Tokyo, JP 3 5
Sakuda, Yusuke Tokyo, JP 1 1

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