Pulsed light beam spectral feature control
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 26, 2017
Issued Date -
N/A
app pub date -
Feb 17, 2017
filing date -
Jun 26, 2015
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A system includes a first actuatable apparatus of an optical source, the first actuatable apparatus being altered within a range of values about a target value to thereby alter a spectral feature of the light beam; a second actuatable apparatus of the optical source, the second actuatable apparatus being altered to thereby alter the spectral feature of the light beam; a metrology system including an observation system configured to output an indication of a deviation between the actual value at which the first actuatable apparatus is operating and the target value; and a control system configured to determine whether the deviation is greater than an acceptable deviation, and, if it is greater than the acceptable deviation, then send a signal to a second actuation module controlling the second actuatable apparatus to adjust the actual value at which the first actuatable apparatus is operating to be closer to the target value.
First Claim
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Family
International Classification(s)
- 2017 Application Filing Year
- G01J Class
- 1764 Applications Filed
- 1425 Patents Issued To-Date
- 80.79 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- G01J Class
- 0 % this patent is cited more than
- 8 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Mar 26, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Mar 26, 2029 |
