Method of inspecting a surface of a substrate and apparatus for performing the same
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United States of America Patent
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Sep 26, 2017
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app pub date -
Aug 15, 2014
filing date -
Oct 31, 2013
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Abstract
In a method of inspecting a surface of a substrate, a first surface image of the substrate before loaded into a process chamber may be obtained. The first surface image may be processed to detect a defect on the surface of the substrate. Thus, the surfaces of all of the substrate may be inspected during a process may be performed without transferring the substrates.
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