Flying sensor head
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United States of America Patent
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Sep 26, 2017
Issued Date -
N/A
app pub date -
Jun 27, 2013
filing date -
Jun 29, 2012
priority date (Note) -
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Abstract
The present disclosure provides a system and method of optical inspection of substrates that have relative large variations in topography. The present disclosure provides a system wherein optical components of the optical inspection system can be automatically moved vertically towards or away from the substrate during optical inspection of the substrate. The system moves the optics in a controlled and precise manner, thereby enabling accurate on-the-fly inspection of substrates having a large variation in topography.
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