Substrate carrier unit for a film deposition apparatus
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United States of America Patent
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Sep 26, 2017
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app pub date -
May 5, 2015
filing date -
May 5, 2015
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Abstract
A substrate carrier unit includes a substrate carrier and a phase transition material. The substrate carrier defines an isolated space therein. The phase transition material is filled into the isolated space of the substrate carrier and has a melting point ranging between 18° C. and 95° C. The phase transition material is capable of absorbing thermal energy from the substrate carrier as latent heat to change the phase from solid to liquid.
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