Method for freeing a micromechanical part and a micromechanical part comprising sacrificial fasteners
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United States of America Patent
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Sep 26, 2017
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Dec 21, 2012
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Dec 22, 2011
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Abstract
A method for fabricating a micromechanical part from a substrate in which the part is fabricated by providing a plurality of fasteners between the part and the substrate, the fasteners being sacrificial, characterized in that the fasteners include at least one hinge at the end of each fastener located beside the part, and in that the method includes a step of breaking the sacrificial fasteners. The micromechanical parts employing this type of sacrificial fastener are also described.
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