Reaction force counteracting device for a metrology tool
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United States of America Patent
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Sep 19, 2017
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app pub date -
Jan 25, 2017
filing date -
Jan 25, 2017
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Abstract
A reaction force counteracting device includes a mounting seat supported on a base seat by means of a vibration isolating assembly, a stage movably mounted on the mounting seat and actuated by a primary actuating member, and a holding table coupled with and movable relative to the stage for holding an object. A reaction force counteracting unit includes a counteraction actuating member coupled with the primary actuating member, and a counteraction moving member actuated by the counteraction actuating member to be moved in an opposite direction relative to an accelerated displacement of the primary actuating member made by a reaction force generated from movement of the stage. A control unit is electronically connected to the primary and counteraction actuating members to control the movement of the counteraction moving member.
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