Imprinted semiconductor multiplex detection array
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United States of America Patent
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Sep 19, 2017
Grant Date -
Aug 1, 2013
app pub date -
Mar 7, 2013
filing date -
Jan 11, 2011
priority date (Note) -
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Abstract
An array of sensor devices, each sensor including a set of semiconducting nanotraces having a width less than about 100 nm is provided. Method for fabricating the arrays is disclosed, providing a top-down approach for large arrays with multiple copies of the detection device in a single processing step. Nanodimensional sensing elements with precise dimensions and spacing to avoid the influence of electrodes are provided. The arrays may be used for multiplex detection of chemical and biomolecular species. The regular arrays may be combined with parallel synthesis of anchor probe libraries to provide a multiplex diagnostic device. Applications for gas phase sensing, chemical sensing and solution phase biomolecular sensing are disclosed.
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