Structures having isolated graphene layers with a reduced dimension
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United States of America Patent
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Sep 19, 2017
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app pub date -
Oct 21, 2014
filing date -
Feb 25, 2013
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Abstract
Graphite-based devices with a reduced characteristic dimension and methods for forming such devices are provided. One or more thin films are deposited onto a substrate and undesired portions of the deposited thin film or thin films are removed to produce processed elements with reduced characteristic dimensions. Graphene layers are generated on selected processed elements or exposed portions of the substrate after removal of the processed elements. Multiple sets of graphene layers can be generated, each with a different physical characteristic, thereby producing a graphite-based device with multiple functionalities in the same device.
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International Classification(s)
- C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
- C01B:NON-METALLIC ELEMENTS; COMPOUNDS THEREOF
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- H01B:CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATER....
- B82B:NANO-STRUCTURES; MANUFACTURE OR TREATMENT THEREOF
- B32B:LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA....
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