Method of controlling the switched mode ion energy distribution system
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United States of America Patent
Stats
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Sep 19, 2017
Issued Date -
N/A
app pub date -
Aug 28, 2012
filing date -
Aug 29, 2010
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Systems, methods and apparatus for regulating ion energies in a plasma chamber and chucking a substrate to a substrate support are disclosed. An exemplary method includes placing a substrate in a plasma chamber, forming a plasma in the plasma chamber, controllably switching power to the substrate so as to apply a periodic voltage function (or a modified periodic voltage function) to the substrate, and modulating, over multiple cycles of the periodic voltage function, the periodic voltage function responsive to a defined distribution of energies of ions at the surface of the substrate so as to effectuate the defined distribution of ion energies on a time-averaged basis.
First Claim
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Family
International Classification(s)
- 2012 Application Filing Year
- C23C Class
- 1946 Applications Filed
- 1591 Patents Issued To-Date
- 81.76 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 95 Citation Count
- C23C Class
- 99.74 % this patent is cited more than
- 8 Age
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| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Mar 19, 2025 |
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