Inspection apparatus and inspection method
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United States of America Patent
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Sep 19, 2017
Issued Date -
May 28, 2015
app pub date -
Nov 13, 2014
filing date -
Nov 27, 2013
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Abstract
An inspection apparatus and an inspection method capable of reducing the effect of noises are provided. An inspection apparatus according to the present invention includes a work table 26 on which an inspection panel 12 is placed, a probe unit 31 including a probe 38 that comes into contact with an electrode 12a of the inspection panel 12 placed on the work table 26, and a stage 11 that moves the work table 26 in order to bring the probe 38 into contact with the electrode 12a of the inspection panel 12 placed on the work table 26, in which the stage 11 is connected to the ground and supports the work table 26 through a resistive element.
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