MEMs device with outgassing shield

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United States of America Patent

PATENT NO 9764946
APP PUB NO 20150115376A1
SERIAL NO

14062157

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Abstract

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A capped micromachined device has a movable micromachined structure in a first hermetic chamber and one or more interconnections in a second hermetic chamber that is hermetically isolated from the first hermetic chamber, and a barrier layer on its cap where the cap faces the first hermetic chamber, such that the first hermetic chamber is isolated from outgassing from the cap.

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Patent Owner(s)

Patent OwnerAddress
ANALOG DEVICES INCONE ANALOG WAY WILMINGTON MA 01887

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Li Belmont, US 997 9317
Nunan, Thomas Kieran Carlisle, US 25 453
Yang, Kuang L Newton, US 33 410

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