Laser apparatus and extreme ultraviolet light generation system
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United States of America Patent
Stats
-
Sep 12, 2017
Grant Date -
Jun 2, 2016
app pub date -
Feb 5, 2016
filing date -
Sep 27, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An example of the disclosure is a laser apparatus including a master oscillator capable of outputting a pulse laser beam, a plurality of optical amplifiers disposed on an optical path of the pulse laser beam outputted from the master oscillator and configured to sequentially amplify the pulse laser beam, an optical reflector capable of passing the pulse laser beam therethrough and reflecting a self-oscillation beam generated in one of the plurality of optical amplifiers, and an optical absorber capable of receiving and absorbing the self-oscillation beam reflected by the optical reflector.
First Claim
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International Classification(s)
- 2016 Application Filing Year
- H01S Class
- 1245 Applications Filed
- 1023 Patents Issued To-Date
- 82.17 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 2 Citation Count
- H01S Class
- 21.26 % this patent is cited more than
- 8 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Mar 12, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Mar 12, 2029 |
