Online calibration for repetition rate dependent performance variables
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United States of America Patent
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Sep 12, 2017
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app pub date -
Dec 21, 2015
filing date -
Dec 21, 2015
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Abstract
Online calibration of laser performance as a function of the repetition rate at which the laser is operated is disclosed. The calibration can be periodic and carried out during a scheduled during a non-exposure period. Various criteria can be used to automatically select the repetition rates that result in reliable in-spec performance. The reliable values of repetition rates are then made available to the scanner as allowed values and the laser/scanner system is then permitted to use those allowed repetition rates.
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