Consensus-based multi-piezoelectric microcantilever sensor
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United States of America Patent
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Sep 12, 2017
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Jun 2, 2016
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Jun 2, 2015
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Abstract
Systems and methods are disclosed that describe a MEMS device and a method of sensing based on a consensus algorithm. The MEMS device is a sensor comprising multiple piezoelectric layers attached to a microcantilever. It can be used to sense deflections or variations in corresponding parameters of systems in micro- and nano-scales. Multiple piezoelectric elements on a microcantilever can provide a more accurate measurement of the microcantilever's deflection. The device can eliminate bulky laser sensors in SPMs and provide additional use as a biosensor, or chemical sensor at the micro- and nano-scale. The consensus sensing algorithm can provide added robustness into the system. If one of the sensing elements or electrodes fails during a sensing process, other elements can compensate and allow for near zero-error measurement.
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