III-nitride transistor with enhanced doping in base layer

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United States of America Patent

PATENT NO 9761709
SERIAL NO

14471980

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Abstract

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A vertical trench MOSFET comprising: a N-doped substrate of a III-N material; and an epitaxial layer of the III-N material grown on a top surface of the substrate, a N-doped drift region being formed in said epitaxial layer; a P-doped base layer of said III-N material, formed on top of at least a portion of the drift region; a N-doped source region of said III-N material; formed on at least a portion of the base layer; and a gate trench having at least one vertical wall extending along at least a portion of the source region and at least a portion of the base layer; wherein at least a portion of the P-doped base layer along the gate trench is a layer of said P-doped III-N material that additionally comprises a percentage of aluminum.

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Patent Owner(s)

Patent OwnerAddress
HRL LABORATORIES LLC3011 MALIBU CANYON ROAD MALIBU CA 90265

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chu, Rongming Agoura Hills, US 54 1544

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