Determining geometric characteristics of reflective surfaces
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United States of America Patent
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Sep 12, 2017
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N/A
app pub date -
Jul 9, 2014
filing date -
Jul 9, 2013
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Abstract
Illustrative embodiments of determining geometric characteristics of reflective surfaces are disclosed. In at least one illustrative embodiment, a method of determining geometric characteristics of reflective surfaces includes sensing electromagnetic waves with a sensor, where the electromagnetic waves have been reflected off a reflective surface of a specimen from a target structure including a feature point. The method further includes determining a displacement of the feature point of the target structure indicated by the sensed electromagnetic waves relative to reference data indicating a reference location for the feature point and determining a surface slope of a point of the reflective surface based on the determined displacement of the feature point of the target structure.
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