Linear motor and stage apparatus
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United States of America Patent
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Sep 5, 2017
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N/A
app pub date -
Jul 2, 2013
filing date -
Jul 31, 2012
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Abstract
A linear motor includes a magnet unit and a coil unit. The magnet unit includes two magnet arrays oppositely parallel and symmetrically located on a magnetic yoke: a first and a second magnet array. The coil unit is disposed in a magnetic gap between the two magnet arrays. In a spatial rectangular coordinate system defined by X, Y and Z axes, the coil unit includes a first and a second coil array arranged in a stacked manner in the Z-axis direction and staggered from each other by a distance of ΔP in the Y-axis direction. ΔP satisfies: when a control system charges the coil unit with a desired current, the coil unit generates a control force along the Y-axis direction, another control force along the Z-axis direction, and a moment about the X-axis direction, which may reduce a magnetic flux leakage and provide higher driving forces, making the linear motor generate required three degrees-of-freedom control force or control torque, and further improve vertical and horizontal magnetic fluxes in the magnet array.
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