Semiconductor device with substantially equal impurity concentration JTE regions in a vicinity of a junction depth
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United States of America Patent
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Sep 5, 2017
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Sep 28, 2016
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Mar 5, 2013
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Abstract
A highly reliable semiconductor device with high withstand voltage is provided. As means therefor, an impurity concentration in a first JTE region is set to 4.4×1017 cm−3 or higher and 6×1017 cm−3 or lower and an impurity concentration in a second JTE region is set to 2×1017 cm−3 or lower in a case of a Schottky diode, and an impurity concentration in the first JTE region is set to 6×1017 cm−3 or higher and 8×1017 cm−3 or lower and an impurity concentration in the second JTE region is set to 2×1017 cm−3 or lower in a case of a junction barrier Schottky diode.
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