Method for coincident alignment of a laser beam and a charged particle beam
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United States of America Patent
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Sep 5, 2017
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Jan 8, 2016
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Sep 7, 2012
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Abstract
A method and apparatus for aligning a laser beam coincident with a charged particle beam. The invention described provides a method for aligning the laser beam through the center of an objective lens and ultimately targeting the eucentric point of a multi-beam system. The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber of the charged particle system.
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